Fabrication and Study of Nickel Phthalocyanine based Surface Type Capacitive Sensors
نویسندگان
چکیده
Thin films of Nickel phthalocynine (NiPc) of different thicknesses (100, 150 and 200 nm) were deposited by thermal evaporator on glass substrates with preliminary deposited aluminum electrodes to form Al/NiPc/Al surface-type capacitive humidity sensors. The capacitance-humidity relationships of the sensors were investigated at humidity levels from 35 to 90% RH. It was observed that the capacitance value increases nonlinearly with increasing humidity level. All measurements were taken at room temperature. Keywords—Capacitive sensor, Humidity, Nickel phthalocyanine, Organic semiconductor.
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